Case study • CTQ evidence • Export-ready delivery

Case Study: Vacuum Chuck Subplate (Flatness‑Critical + Groove Features)

An anonymized program where a vacuum chuck subplate required stable flatness, consistent sealing grooves, and CTQ inspection evidence for a U.S. tool-build team.

Semiconductor tooling and fixtures — Vacuum Chuck Subplate (Flatness‑Critical + Groove Features)
Semiconductor machining — evidence-driven delivery

Program snapshot

Customer: Semiconductor equipment integrator (U.S. program; customer name withheld)

Part: Vacuum chuck subplate used in tool assembly; interfaces with sealing grooves and alignment features

Why it mattered: Small deviations in flatness or groove geometry can create leak paths, misalignment, or calibration drift during tool setup

SEMIX role: Manufacturing planning, CNC machining, CTQ inspection planning, and documentation for receiving

Program details (disclosure‑safe)
FieldDetails (public)
Material / finishAnonymized (share under NDA if needed)
Size envelopeAnonymized (available under NDA)
Qty rangePrototype to low-volume programs (anonymized)
CTQ focusDatums + functional features (CTQs defined at RFQ)
Tolerance & verificationTight/critical features verified on CTQ-focused report (ranges shared under NDA)
Lead timeQuoted per RFQ; schedule aligned to customer gate dates (ranges under NDA)
Evidence packCTQ report • CoC • material/finish certs (as applicable) • packaging notes

Key requirements

Key requirements (anonymized)
AreaRequirement
Geometry integrityFlatness and parallelism controlled on functional surfaces (per drawing CTQs)
Sealing featuresO‑ring grooves and sealing lands required consistent width/depth and clean edges
Surface qualityFunctional surfaces required controlled finish and careful handling to prevent nicks
DocumentationCTQ inspection report and revision traceability for U.S. receiving
SchedulePrototype-to-pilot build with short iteration cycles

How we executed

SEMIX approached the build as a controlled workflow: confirm CTQs, plan measurement methods, and prevent revision drift.

  1. NDA-first onboarding: confirmed confidentiality requirements and received controlled drawing/model revisions.
  2. Contract review + CTQ mapping: identified functional surfaces, sealing grooves, and alignment datums as CTQs.
  3. Routing design: planned machining to protect datum structure and minimize distortion risk.
  4. In‑process checks: verified critical features before finishing operations to prevent late-stage rework.
  5. CTQ inspection plan: aligned measurement methods to CTQs and prepared a receiving-friendly report format.
  6. Packaging discipline: protected functional surfaces and labeled by revision/PO line for receiving.

engineering services DFM checklist

Quality evidence and documentation

To make receiving easy for a U.S.-based program, we shipped with evidence aligned to CTQs and revision control.

  • CTQ inspection report aligned to functional surfaces and sealing groove features
  • Certificate of Conformance (CoC) referencing drawing revision and material/finish as specified
  • Revision traceability across quote → PO → inspection report
  • Protective packaging to prevent damage to sealing lands and datums during transit

Evidence pack preview (redacted)

On request, we can share redacted examples of the exact report formats our U.S. buyers receive—so your receiving team knows what to expect.

CTQ dimensional report (sample)

Redacted layout showing CTQ callouts, datums, and how pass/fail is stated.

Request sample pack

Packaging / kitting notes (sample)

Redacted packaging notes for protection, labeling, and kitted shipments (if applicable).

Packaging & kitting

Documentation packages Inspection & metrology

Outcome

  • Functional surfaces received without damage due to packaging rules and handling discipline
  • Receiving team could verify acceptance quickly using a CTQ-focused inspection report
  • Iteration cycles shortened because assumptions and CTQs were written clearly and reused for the next build

Outcome metrics are anonymized. The point is the workflow: stable routing, CTQ measurement, and receiving-ready documentation.

Outcome highlights

Receiving acceptance

Evidence formatted for receiving review; CTQs highlighted to reduce back-and-forth.

Quality control

CTQ inspection plan executed; CoC and required certs packaged with the shipment.

Schedule & handoff

Delivery and documentation aligned to the customer’s internal gate / PO flow-down.

Evidence patterns (technical case studies)

Incident-style write-ups that show how SEMIX handles common failure modes and prevents receiving disputes:

Documentation templates (print-to-PDF)

Want consistent receiving-ready evidence? These templates show typical formats SEMIX can provide with shipments (redacted samples available under NDA):

All evidence patterns Document samples

Request a QuoteEvidence pack